CH J, N Siddaiah. Sensitivity analysis of nems cantilever to detect volatile organic compounds using finite element method: DOI: 10.48129/kjs.20501 . KJS [Internet]. 2023Jun.1 [cited 2026May6];50(3A). Available from: https://journals.ku.edu.kw/kjs/index.php/KJS/article/view/20501